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Transient and furnace annealing of ion implanted gallium arsenide

著者名:
  • Williams, J.S. ( Department of Communication and Electronic Engineering, Royal Melbourne Institute of Technology, Melbourne, 3000, Australia )
  • Harrison, H.B. ( Department of Communication and Electronic Engineering, Royal Melbourne Institute of Technology, Melbourne, 3000, Australia )
掲載資料名:
Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposia proceedings
シリーズ巻号:
1
発行年:
1981
開始ページ:
209
終了ページ:
222
出版情報:
New York: North Holland
ISSN:
02729172
ISBN:
9780444005953 [0444005951]
言語:
英語
請求記号:
M23500/1
資料種別:
国際会議録

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