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Growth of Thin Films by UHV Ion Beam Sputtering Deposition Technique

著者名:
掲載資料名:
Erosion and growth of solids stimulated by atom and ion beams
シリーズ名:
NATO ASI series. Series E, Applied sciences
シリーズ巻号:
112
発行年:
1986
開始ページ:
457
終了ページ:
460
総ページ数:
4
出版情報:
Dordrecht: Martinus Nijhoff Publishers
ISSN:
0168132X
ISBN:
9789024726899 [9024726891]
言語:
英語
請求記号:
N11482/112
資料種別:
国際会議録

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