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MEMS-IDT-based microaccelerometers and gyroscopes

著者名:
掲載資料名:
Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3891
発行年:
1999
開始ページ:
134
終了ページ:
143
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434920 [0819434922]
言語:
英語
請求記号:
P63600/3891
資料種別:
国際会議録

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