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Micromachined accelerometer based on electron tunneling

著者名:
Yang,Y. ( Southeast Univ. )
Li,L.
Xu,Y.
Zhao,Y.
Liang,C.
Wei,T.
さらに 1 件
掲載資料名:
Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3891
発行年:
1999
開始ページ:
121
終了ページ:
125
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434920 [0819434922]
言語:
英語
請求記号:
P63600/3891
資料種別:
国際会議録

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