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Effects of high-density plasma processing on MOSFET matching,noise,and hot carrier reliability

著者名:
Sen,S. ( Lucent Technologies/Bell Labs. )
Harris,E.B.
Gregor,R.W.
Martin,S.
Abdelgadir,M.A.
Barba,R.N.
Chetlur,S.
Steiner,K.
さらに 3 件
掲載資料名:
Microelectronic Device Technology III
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3881
発行年:
1999
開始ページ:
112
終了ページ:
120
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434784 [0819434787]
言語:
英語
請求記号:
P63600/3881
資料種別:
国際会議録

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