Structure-Property Relationship of Acetal- and Ketal-Blocked Polyvinyl Phenols as Polymeric Binder in Two-Component Positive Deep-UV Photoresists
- 著者名:
Mertesdorf, C. Munzel, N. Falcigno, P. Kirner, H. J. Nathal, B. Schacht, H. T. Schulz, R. Slater, S. G. Zettler, A. - 掲載資料名:
- Microelectronics technology : polymers in advanced imaging and packaging : developed from a symposium sponsored by the ACS Division of Polymeric Materials: Science and Engineering, Inc., and the Polymers for Microelectronics Division of the Society of Polymer Science, Japan, at the 209th National Meeting of the American Chemical Society, Anaheim, California, April 2-6, 1995
- シリーズ名:
- ACS symposium series
- シリーズ巻号:
- 614
- 発行年:
- 1995
- 開始ページ:
- 35
- 出版情報:
- Washington, D.C.: American Chemical Society
- ISSN:
- 00976156
- ISBN:
- 9780841233324 [0841233322]
- 言語:
- 英語
- 請求記号:
- A05800/614
- 資料種別:
- 国際会議録
類似資料:
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
American Chemical Society |
American Chemical Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
American Chemical Society |