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Combined Spectroscopic Ellipsometry and Ion Beam Surface Analysis for In Situ, Real-Time Characterization of Complex Oxide Film Growth

著者名:
Mueller, A. H.
Gao, Y.
Irene, E. A.
Auciello, O.
Krauss, A. R.
Schultz, J. A.
さらに 1 件
掲載資料名:
In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
569
発行年:
1999
開始ページ:
15
出版情報:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994768 [1558994769]
言語:
英語
請求記号:
M23500/569
資料種別:
国際会議録

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