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Field Emission Properties of Ion-Beam Synthesized SiC/Si Heterostructures by MEVVA Implantation

著者名:
Chen, Dihu
Wong, S. P.
Cheung, W. Y.
Luo, E. Z.
Wu, W.
Xu, J. B.
Wilson, I. H.
Kwok, R. W. M.
さらに 3 件
掲載資料名:
Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
509
発行年:
1998
開始ページ:
199
出版情報:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994157 [1558994157]
言語:
英語
請求記号:
M23500/509
資料種別:
国際会議録

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