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Characterization of the Thin Diamondlike Carbon Films Deposited Using rf Inductively Coupled CH4-Plasma Source

著者名:
Druz, B.
Polyakov, V. I.
Ostan, E.
Hayes, A.
Rukovishnikov, A. I.
Rossukanyi, N. M.
Khomich, A. V.
さらに 2 件
掲載資料名:
Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
446
発行年:
1997
開始ページ:
413
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993501 [1558993509]
言語:
英語
請求記号:
M23500/446
資料種別:
国際会議録

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