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Optimization of PECVD SiN Films Using a Statistically Designed Experiment

著者名:
掲載資料名:
Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
446
発行年:
1997
開始ページ:
121
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993501 [1558993509]
言語:
英語
請求記号:
M23500/446
資料種別:
国際会議録

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