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Preparation and Properties of Ferroelectric Bi2SrTa2O9 Thin Films for FeRAM Using Flash-MOCVD

著者名:
Ami, T.
Hironaka, K.
Isobe, C.
Nagel, N.
Sugiyama, M.
Ikeda, Y.
Watanabe, K.
Machida, A.
Miura, K.
Tanaka, M.
さらに 5 件
掲載資料名:
Metal-organic chemical vapor deposition of electronic ceramics II : symposium held on November 27-29 1995, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
415
発行年:
1996
開始ページ:
195
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993181 [1558993185]
言語:
英語
請求記号:
M23500/415
資料種別:
国際会議録

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