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PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF SILICON NITRIDE FROM NOVEL ORGANOSILANES

著者名:
掲載資料名:
Materials and processes for environmental protection : symposium held April 5-7, 1994, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
344
発行年:
1994
開始ページ:
241
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992399 [1558992391]
言語:
英語
請求記号:
M23500/344
資料種別:
国際会議録

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