Optical proximity effects correction at 0.25ヲフm incorporating process variations in lithography
- 著者名:
Tritchkov,A. ( Interuniv.Micro-Elektronica Centrum vzw ) Rieger,M.L. Stirniman,J.P. Yen,A. Ronse,K. Vandenberghe,G. hove,L.Van den - 掲載資料名:
- Optical Microlithography X
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3051
- 発行年:
- 1997
- 開始ページ:
- 726
- 終了ページ:
- 738
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424655 [081942465X]
- 言語:
- 英語
- 請求記号:
- P63600/3051
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Top-surface imaging and optical proximity correction:a way to 0.18-ヲフm lithography at 248 nm
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |