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Challenge of 1-Gb DRAM development when using optical lithography

著者名:
Farrell,T.R. ( IBM Microelectronics Div. )
Nunes,R.
Samuels,D.J.
Thomas,A.
Ferguson,R.A.
Molless,A.
Wong,A.K.
Conley,W.
Wheeler,D.C.
Credendino,S.
Naeem,M.
Hoh,P.
Lu,Z.
さらに 8 件
掲載資料名:
Optical Microlithography X
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3051
発行年:
1997
開始ページ:
333
終了ページ:
341
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424655 [081942465X]
言語:
英語
請求記号:
P63600/3051
資料種別:
国際会議録

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