Full-field CD control for sub-0.20-ヲフm patterning
- 著者名:
Sturtevant,J.L. ( Motorola ) Allgair,J. Barrick,M.W. Fu,C. Green,K.G. Hershey,R.R. Litt,L.C. Maltabes,J.G. Nelson,C. Roman,B.J. Singelyn,J. - 掲載資料名:
- Optical Microlithography X
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3051
- 発行年:
- 1997
- 開始ページ:
- 137
- 終了ページ:
- 145
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424655 [081942465X]
- 言語:
- 英語
- 請求記号:
- P63600/3051
- 資料種別:
- 国際会議録
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