Lateral force microscopy using cantilevers with integrated Wheatstone bridge piezoresistive deflection sensor

Lateral force microscopy using cantilevers with integrated Wheatstone bridge piezoresistive deflection sensor

著者名:

Gotszalk,T. ( Technical Univ.of Wroclaw )
Rangelow,I.W.
Dumania,P.
Grabiec,P.B.

掲載資料名:

Microlithography and Metrology in Micromachining II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2880

発行年:

1996

開始ページ:

256

終了ページ:

263

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422781 [0819422789]

言語:

英語

請求記号:

P63600/2880

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016556
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Microlithography and Metrology in Micromachining
回次:	1996 : 2nd
会議開催地:	Austin, TX, USA
会議開催年:	1996.10.14-1996.10.15

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