Measurements of fracture strength and Young's modulus of surface-micromachined polysilicon

Measurements of fracture strength and Young's modulus of surface-micromachined polysilicon

著者名:

Read,D.T. ( National Institute of Standards and Technology )
Marshall,J.C.

掲載資料名:

Microlithography and Metrology in Micromachining II

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2880

発行年:

1996

開始ページ:

56

終了ページ:

63

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422781 [0819422789]

言語:

英語

請求記号:

P63600/2880

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016556
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Microlithography and Metrology in Micromachining
回次:	1996 : 2nd
会議開催地:	Austin, TX, USA
会議開催年:	1996.10.14-1996.10.15

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