AFM with piezoresistive Wheatstone bridge cantilever:noise performance and applications in contact and noncontact mode

AFM with piezoresistive Wheatstone bridge cantilever:noise performance and applications in contact and noncontact mode

著者名:

Gotszalk,T. ( Technical Univ.of Wroclaw )
Linnemann,R.
Rangelow,I.W.
Dumania,P.
Grabiec,P.

掲載資料名:

Metal/Nonmetal Microsystems: Physics, Technology, and Applications

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2780

発行年:

1996

開始ページ:

376

終了ページ:

379

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819421661 [0819421669]

言語:

英語

請求記号:

P63600/2780

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016546
シリーズID:	PA00000029
会議名:	Metal/Nonmetal Microsystems
回次:	1995
会議開催地:	Polanica Zdroj, Poland
会議開催年:	1995.09.11-1995.09.14

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