FTIR study of oxygen precipitation in high-pressure-treated Cz-Si contaminated by transition metals

FTIR study of oxygen precipitation in high-pressure-treated Cz-Si contaminated by transition metals

著者名:

Surma,B. ( Institute of Electronic Materials Technology )
Misiuk,A.
Mozdzonek,M.
Hartwig,J.
Prieur,E.

掲載資料名:

Metal/Nonmetal Microsystems: Physics, Technology, and Applications

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2780

発行年:

1996

開始ページ:

160

終了ページ:

165

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819421661 [0819421669]

言語:

英語

請求記号:

P63600/2780

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016546
シリーズID:	PA00000029
会議名:	Metal/Nonmetal Microsystems
回次:	1995
会議開催地:	Polanica Zdroj, Poland
会議開催年:	1995.09.11-1995.09.14

類似資料:

1 国際会議録 Formation and evolution of the oxygen precipitates in CZ-Si upon high pressure- high temperature treatment Antonova, I.V., Misiuk, A., Popov, V.P., Plotnikov, A.E., Surma, B. Electrochemical Society	7 国際会議録 Electrically active defects in Ni-contaminated Cz-Si with oxygen precipitates Kaminski,P., Kozlowski,R., Misiuk,A. SPIE-The International Society for Optical Engineering
2 国際会議録 Microstress in high-pressure temperature-treated Czochralski-grown silicon with oxygen concentration up to 1.2 x 10¹⁸ cm^-3 A. Misiuk Society of Photo-optical Instrumentation Engineers	8 国際会議録 Uniform stress effect on initial stages of oxygen precipitation in Czochralski-grown silicon (Invited Paper) Misiuk,A. SPIE-The International Society for Optical Engineering
3 国際会議録 Oxygen Precipitation in CZ Silicon Crystals Contaminated with Iron Jablonski,J., Shen,B., Mchedlidze,T.R., Imai,M., Sumino,K. Trans Tech Publications	9 国際会議録 High Resolution DLTS Studies of Transition-Metal-Related Defects in Silicon Dobaczewski,L., Kaminski,P., Kozlowski,R., Surma,M. Trans Tech Publications
4 国際会議録 Photoluminescence studies of Czochralski-grown silicon pressure-annealed at<1000 K Misiuk,A., Surma,H.B. SPIE - The International Society for Optical Engineering	10 国際会議録 Annihilation of thermal donors in silicon annealed under high hydrostatic pressure Misiuk, A. SPIE-The International Society for Optical Engineering
5 国際会議録 Investigation of system Si-O (SiOx) behavior in DAC at submegabar pressure Efros,B.M., Shishkova,N.V., Prudnikov,A., Misiuk,A., Bak-Misiuk,J., Hartwig,J. SPIE-The International Society for Optical Engineering	11 国際会議録 Application of High Temperature-Pressure Treatment for Investigation of Defect Creation in Basic Materials of Modern Microelectronics: Czochralski Silicon and … Misiuk, A. Kluwer Academic Publishers
6 国際会議録 On the Influence of Transition Metal Impurities on the Oxygen Precipitation in CZ-Grown Silicon Reiche,M. Trans Tech Publications	12 国際会議録 Electrical characteristics of SOI-like structures formed in nitrogen or oxygen implanted silicon treated under high pressure Antonova, I.V., Misiuk, A., Londos, C.A. Electrochemical Society

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