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Electrically active defects in Ni-contaminated Cz-Si with oxygen precipitates

著者名:
掲載資料名:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2780
発行年:
1996
開始ページ:
137
終了ページ:
140
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421661 [0819421669]
言語:
英語
請求記号:
P63600/2780
資料種別:
国際会議録

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