Material and processing issues for the monolithic integration of microelectronics with surface-micromachined polysilicon sensors and actuators

Material and processing issues for the monolithic integration of microelectronics with surface-micromachined polysilicon sensors and actuators

著者名:

Smith,J.H. ( Sandia National Labs. )
Montague,S.
Sniegowski,J.J.

掲載資料名:

Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2639

発行年:

1995

開始ページ:

64

終了ページ:

73

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420053 [0819420050]

言語:

英語

請求記号:

P63600/2639

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016532
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachining and Microfabrication Process Technology
回次:	1995
会議開催地:	Austin, TX, USA
会議開催年:	1995.10.23-1995.10.24

類似資料:

1 国際会議録 Micromachined sensor and actuator research at the Microelectronics Development Laboratory J.H. Smith, C.C. Barron, J.G. Fleming, S. Montague, J.L. Rodriguez Society of Photo-optical Instrumentation Engineers	7 国際会議録 Actuation of polysilicon surface-micromachined mirrors Tien,N.C., Kiang,M.-H., Daneman,M.J., Solgaard,O., Lau,K.Y., Muller,R.S. SPIE-The International Society for Optical Engineering
2 国際会議録 Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators Smith,J.H., Carson,R.F., Sullivan,C.T., McClellan,G. SPIE-The International Society for Optical Engineering	8 国際会議録 Reproducibility data on SUMMiT Limary,S., Stewart,H., Irwin,L.W., McBrayer,J., Sniegowski,J.J., Montague,S., Smith,J.H., Boer,M.P.de, Jakubczak,J.F. SPIE - The International Society for Optical Engineering
3 国際会議録 Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS Smith,J.H., Montague,S., Sniegowski,J.J., Murray,J.R., Manginell,R.P., McWhorter,P.J., Huber,R.J. SPIE-The International Society for Optical Engineering	9 国際会議録 Critical issues for the application of integrated MEMS/CMOS technologies to inertial measurement units Smith,J.H., Montague,S., Allen,J.J., Ellis,J.R., Burgett,S.M. SPIE-The International Society for Optical Engineering
4 国際会議録 Integrated mold/surface-micromachining process Barron,C.C., Fleming,J.G., Montague,S., Sniegowski,J.J., Hetherington,D.L. SPIE-The International Society for Optical Engineering	10 国際会議録 Friction in surface-micromachined microengines Miller,S.L., Sniegowski,J.J., LaVigne,G., McWhorter,P.J. SPIE-The International Society for Optical Engineering
5 国際会議録 Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology (Invited Paper) Smith,J.H., Rodgers,M.S., Sniegowski,S.L., Miller,S.L., Hetherington,D.L., McWhorter,P.J., Warren,M.E. SPIE-The International Society for Optical Engineering	11 国際会議録 Chemical Mechanical Polishing: An Enabling Fabrication Process for Surface Micromachining Technologies Sniegowski, Jeffry J. Electrochemical Society
6 国際会議録 Micromechanical structures and microelectronics for acceleration sensing Davies,B.R., Montague,S., Smith,J.H., Lemkin,M. SPIE-The International Society for Optical Engineering	12 国際会議録 Improved polysilicon surface-micromachined micromirror devices using chemical-mechanical polishing Hetherington, Dale L., Sniegowski, Jeffry J. SPIE

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