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Excimer laser drilling of polymers

著者名:
  • Chen,Y.H. ( Gintic Institute of Manufacturing Technology(Singapore) )
  • Zheng,H.Y. ( Gintic Institute of Manufacturing Technology(Singapore) )
  • Wong,K.S. ( Gintic Institute of Manufacturing Technology(Singapore) )
  • Tam,S.C. ( Nanyang Technological Univ.(Singapore) )
掲載資料名:
Microelectronic Packaging and Laser Processing
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3184
発行年:
1997
開始ページ:
202
終了ページ:
210
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426116 [0819426113]
言語:
英語
請求記号:
P63600/3184
資料種別:
国際会議録

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