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Audible acoustic wave real-time monitoring in laser processing of microelectronic materials

著者名:
  • Hong,M.H. ( Data Storage Institute(Singapore) )
  • Lu,Y.F. ( National Univ.of Singapore )
  • Song,W.D. ( Data Storage Institute(Singapore) )
  • Liu,D.M. ( National Univ.of Singapore )
  • Low,T.S. ( Data Storage Institute(Singapore) )
掲載資料名:
Microelectronic Packaging and Laser Processing
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3184
発行年:
1997
開始ページ:
148
終了ページ:
157
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426116 [0819426113]
言語:
英語
請求記号:
P63600/3184
資料種別:
国際会議録

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