Characterization of environmental halogen molecule contamination-induced pad surface corrosion
- 著者名:
Chu,P.-T. ( Taiwan Semiconductor Manufacturing Co. ) Cho,C.W. ( Taiwan Semiconductor Manufacturing Co. ) Hsiao,H.C. ( Taiwan Semiconductor Manufacturing Co. ) Wu,J.S. ( Taiwan Semiconductor Manufacturing Co. ) Hung,C.C. ( Taiwan Semiconductor Manufacturing Co. ) Chao,Y.C ( Taiwan Semiconductor Manufacturing Co. ) - 掲載資料名:
- Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3216
- 発行年:
- 1997
- 開始ページ:
- 19
- 終了ページ:
- 26
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426482 [0819426482]
- 言語:
- 英語
- 請求記号:
- P63600/3216
- 資料種別:
- 国際会議録
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