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Experimental verification of a new physically based low-energy (<5 keV) ion implant model

著者名:
Obradovic,B.J. ( Univ.of Texas at Austin )
Morris,S.J. ( Univ.of Texas at Austin )
Morris,M.F. ( Univ.of Texas at Austin )
Tian,S. ( Univ.of Texas at Austin )
Wang,G. ( Univ.of Texas at Austin )
Beardmore,K. ( Los Alamos National Lab. )
Snell,C.M. ( Los Alamos National Lab. )
Jackson,J. ( Eaton Corp. )
Baumann,S. ( Evans Texas )
Tasch,A.F. ( Univ.of Texas at Austin )
さらに 5 件
掲載資料名:
Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3506
発行年:
1998
開始ページ:
301
終了ページ:
312
出版情報:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429650 [0819429651]
言語:
英語
請求記号:
P63600/3506
資料種別:
国際会議録

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