測定学から見た真空計測の基礎 (3) 真空計の校正結果と不確かさ評価の例
Basics of Vacuum Measurement from Viewpoint of Metrology (3) An Example to Estimate Measurement Uncertainties Based on Guide to the Expression of Uncertainty in Measurement (GUM) for Calibrations of Vacuum Gauges
- Author(s):
Hajime YOSHIDA 吉田 肇 Kenta ARAI 新井 健太 Hideaki IIZUMI 飯泉 英昭 Hiroaki KAJIKAWA 梶川 宏明 Momoko KOJIMA 小島 桃子 - Publication title:
- 真空 : journal of the Vacuum Society of Japan
- Pub. Year:
- 2015
- Vol.:
- 58
- Issue:
- 6
- Page(from):
- 227
- Page(to):
- 237
- Pages:
- 11
- Pub. info.:
- 東京: 真空協会
- ISSN:
- 18822398
- Language:
- Japanese
- Type:
- Academic Journal
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