1.

Conference Proceedings
Conference Proceedings
1. PERFORMANCE OF 'DDC': DILUTED DYNAMIC CLEAN BEFORE 4.5 nm GATE OXIDE
Boelen, P. ; Matthews, R. ; Kashkoush, I. ; Novak, R.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.15-22,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings
Conference Proceedings
2. OPTIMIZATION OF DILUTE SC1
Boelen, P. ; Lardin, T. ; Sandrier, B. ; Matthews, R. ; Kashkoush, I. ; Novak, R. ; Tardif, F.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.161-167,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
3.

Conference Proceedings
Conference Proceedings
3. Photoresist Stripping Using Ozone/Deionized Water Chemistry
Kashkoush, I. ; Matthews, R. ; Novak, R. ; Brause, E. ; Carrillo, F. ; Rajaram, B.
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.173-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477