CAD/CAM for MEMS and BioMEMS
- Author(s):
Hargrave, B. ( nScrypt, LLC (USA) ) Irwin, B. ( nScrypt, LLC (USA) ) Parkhill, R. ( nScrypt, LLC (USA) ) Church, K.H. ( nScrypt, LLC (USA) ) Nguyen, M.N. ( BioAssembly, LLC (USA) ) Kachurin, A. ( BioAssembly, LLC (USA) ) Warren, W.L. ( BioAssembly, LLC (USA) ) - Publication title:
- Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5389
- Pub. Year:
- 2004
- Page(from):
- 114
- Page(to):
- 125
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453068 [0819453064]
- Language:
- English
- Call no.:
- P63600/5389
- Type:
- Conference Proceedings
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