Fabrication of reflective micromirror in micromechanical optical switches
- Author(s):
Dong, W. ( Jilin Univ. (China) ) Chen, W.Y. Yang, H. Zhang, L. Ji, P. Guo, W.B. Liu, C.X. Zhang, X.D. Sun, D.M. Jia, C.P. Pan, J.X. - Publication title:
- MEMS/MOEMS Technologies and Applications
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4928
- Pub. Year:
- 2002
- Page(from):
- 103
- Page(to):
- 107
- Pages:
- 5
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819447173 [081944717X]
- Language:
- English
- Call no.:
- P63600/4928
- Type:
- Conference Proceedings
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