Hybrid intergration of light emitters and detectors with SOI-based micro-opto-electro-mechanical systems (MOEMS)
- Author(s):
Kubby,J.A. ( NIST/ATP MOEMS Manufacturing Consortium ) Calamita,J. Chang,J. Chen,J. Gulvin,P. Lin,C.-C. Lofthus,R. Nowak,B. Su,Y. Tran,A. Burns,D. Bryzek,J. Gilbert,J. Hsu,C. Korsmeyer,T. Morris,A.S. Plowman,T.E. Rabinovich,V.L. Daiber,T.D. Scharf,B.R. - Publication title:
- Silicon-based and Hybrid Optoelectronics III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4293
- Pub. Year:
- 2001
- Page(from):
- 32
- Page(to):
- 45
- Pages:
- 14
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819439710 [0819439711]
- Language:
- English
- Call no.:
- P63600/4293
- Type:
- Conference Proceedings
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