High power injection lock 6kHz 60W laser for ArF dry/wet lithography [6154-78]
- Author(s):
Mizoguchi, H. ( Gigaphoton Inc. (Japan) ) Inoue, T. ( Ushio Inc. (Japan) ) Fujimoto, J. ( Komatsu Ltd. (Japan) ) Suzuki, T. ( Komatsu Ltd. (Japan) ) Matsunaga, T. ( Komatsu Ltd. (Japan) ) Sakanish, S. ( Komatsu Ltd. (Japan) ) Kaminishi, M. ( Komatsu Ltd. (Japan) ) Watanabe, Y. ( Komatsu Ltd. (Japan) ) Nakaike, T. ( Komatsu Ltd. (Japan) ) Shinbori, M. ( Ushio Inc (Japan) ) Yoshino, M ( Ushio Inc (Japan) ) Kawasuji, T ( Komatsu Ltd. (Japan) ) Nogawa, H ( Komatsu Ltd. (Japan) ) Umeda, H ( Komatsu Ltd. (Japan) ) Taniguchi, H ( Ushio Inc (Japan) ) Sasaki, Y ( Ushio Inc (Japan) ) Kinoshita, J ( Ushio Inc (Japan) ) Abe T ( Ushio Inc (Japan) ) Tanaka, H ( Komatsu Ltd (Japan) ) Hayashi, H ( Komatsu Ltd (Japan) ) Miyao, K ( Ushio Inc (Japan) ) Niwano, M ( Komatsu Ltd (Japan) ) Kurosu, A ( Komatsu Ltd (Japan) ) Yashiro, M ( Ushio Inc (Japan) ) Nagano, H ( Ushio Inc (Japan) ) Igarashi, T ( Komatsu Ltd (Japan) ) Mimura, T ( Komatsu Ltd (Japan) ) Kakizaki, K ( Ushio Inc (Japan) ) - Publication title:
- Optical Microlithography XIX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6154
- Pub. Year:
- 2006
- Pt.:
- 2
- Page(from):
- 615425
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461971 [0819461970]
- Language:
- English
- Call no.:
- P63600/6154
- Type:
- Conference Proceedings
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