Optical and Electrical Properties of Undoped Microcrystalline Silicon Deposited by the VHF-GD with Different Dilutions of Silane in Hydrogen
- Author(s):
Beck, N. Torres, P. Fric, J. Remes, Z. Poruba, A. Stuchlikova, H. A. Fejfar, A. Wyrsch, N. Vanecek, M. Kocha, J. Shah, A. - Publication title:
- Advances in microcrystalline and nanocrystalline semiconductors, 1996 : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 452
- Pub. Year:
- 1997
- Page(from):
- 761
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993563 [1558993568]
- Language:
- English
- Call no.:
- M23500/452
- Type:
- Conference Proceedings
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