Advanced Silicon Wafers for 0.18 μm Design Rule and Beyond: Epi and fFLASH!*
- Author(s):
Schmolke, R. Blietz, M. Schauer, R. Zemke, D. Oelkrug, H. Ammon, W.v. Lambert, U. Grtlf, D. - Publication title:
- High Purity Silicon VI : proceedings of the sixth International Symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2000-17
- Pub. Year:
- 2000
- Page(from):
- 3
- Page(to):
- 18
- Pages:
- 16
- Pub. info.:
- Bellingham, Wash.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772846 [1566772842]
- Language:
- English
- Call no.:
- E23400/200017
- Type:
- Conference Proceedings
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