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流路長の長い矩形スリットのコンダクタンス測定
Conductance of a Long Rectangular Channel -Pressure Dependence -

Author(s):
Norio OGIWARA
荻原 徳男
Yusuke HIKICHI
引地 裕輔
Junichiro KAMIYA
神谷 潤一郎
Michikazu KINSHO
金正 倫計
Hajime YOSHIDA
吉田 肇
Kenta ARAI
新井 健太
7 more
Publication title:
真空 : journal of the Vacuum Society of Japan
Pub. Year:
2017
Vol.:
60
Issue:
12
Page(from):
475
Page(to):
480
Pages:
6
Pub. info.:
東京: 真空協会
ISSN:
18822398
Language:
Japanese
Type:
Academic Journal

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