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水クラスターイオンビーム源の開発と利用
Development of Water Cluster Ion Beam Source and Its Application

Author(s):
Publication title:
真空 : journal of the Vacuum Society of Japan
Pub. Year:
2016
Vol.:
59
Issue:
5
Page(from):
128
Page(to):
133
Pages:
6
Pub. info.:
東京: 真空協会
ISSN:
18822398
Language:
Japanese
Type:
Academic Journal

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