Synthesis and characteristics of nanostructured silicon-rich nitride thin films using modified long-wavelength CO2 laser annealing

Synthesis and characteristics of nanostructured silicon-rich nitride thin films using modified long-wavelength CO₂ laser annealing

Author(s):

Publication title:

Laser physics letters

Pub. Year:

2015

Vol.:

12

Issue:

9

Page(from):

96003

Page(to):

96003

Pages:

6

Pub. info.:

Weinheim, Germany: Wiley-VCH

ISSN:

16122011

Language:

English

Type:

Academic Journal

Details

TDL ID:

ZA00066298

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