Plasma Annealing of Copper Wire with the Coaxial Cylinder Reactor
- Author(s):
K. Maeda ( Nagaoka University of Technology, Nagaoka, Japan ) S. Furuya T. Kikuchi N. Harada M. Fuse ( Saikawa Co. Ltd., Kashiwazaki, Japan ) T. Aizawa - Publication title:
- AIAA meeting papers on disc
- Title of ser.:
- AIAA Paper : Aerospace Sciences Meeting and Exhibit
- Ser. no.:
- 2009
- Pub. Year:
- 2009
- No.:
- 2009-1538
- Paper no.:
- AIAA Paper 2009-1538
- Pub. info.:
- Reston, Va.: American Institute of Aeronautics and Astronautics
- ISSN:
- 10877215
- Language:
- English
- Call no.:
- A07400/200901
- Type:
- Technical Paper
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