Single Crystal Silicon Low-g Acceleration Sensor.

Single Crystal Silicon Low-g Acceleration Sensor.

Author(s):

Publication title:

2002 SAE world congress : technical paper

Title of ser.:

Society of Automotive Engineers technical paper series

Ser. no.:

2002

Pub. Year:

2002

No.:

2002-01-1080

Paper no.:

2002-01-1080

Pages:

5

Pub. info.:

Warrendale, Penn.: Society of Automotive Engineers

ISSN:

01487191

Language:

English

Call no.:

S10400

Type:

Technical Paper

Details

TDL ID:	ZA00001728
Series ID:	PA00000058
Conf. info. (Name):	SAE 2002 World Congress
Conf. info. (Number):	2002
Conf. info. (Venue):	Detroit, Michigan, USA
Conf. info. (Date):	2002.03.04-2002.03.07
Note for article:	SAE 2002 World Congress, Detroit, Michigan, 4-7 March 2002; Reprinted From: Sensors and Actuators 2002, SP-1659

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