An Actuator for Controlling the Area of Dielectric Layer of the Tunable Capacitor by Commercial CMOS Fabrication.

An Actuator for Controlling the Area of Dielectric Layer of the Tunable Capacitor by Commercial CMOS Fabrication.

Author(s):

Publication title:

A.S.M.E. paper

Title of ser.:

ASME Technical Paper : IMECE

Ser. no.:

2003

Pub. Year:

2003

No.:

IMECE2003-41717

Paper no.:

IMECE2003-41717

Pages:

5

Pub. info.:

New York, NY: American Society of Mechanical Engineers

Language:

English

Call no.:

A11800

Type:

Technical Paper

Details

TDL ID:	ZA00001646
Series ID:	PA00000135
Conf. info. (Name):	ASME International Mechanical Engineering Congress
Conf. info. (Number):	2003
Conf. info. (Venue):	Washington, D.C.
Conf. info. (Date):	2003.11.15-2003.11.21
Note for article:	International Mechanical Engineering Congress, ASME, Washington, DC, 15-21 Nov. 2003

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