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MEMS Reliability: From Experimental Results to the Understanding of Physical Phenomena

Author(s):
Pressecq, F. ( Centre National d'Etudes Spatiales, Toulouse, France )
Schmitt, P.
Veyrie, D.
Duong, Q.
Lafontan, X. ( NovaMEMS, Saverdun, France )
Lellouchi, D.
1 more
Publication title:
AIAA meeting papers on disc
Title of ser.:
AIAA Paper : Conference on Micro-Nano-Technologies
Ser. no.:
2004
Pub. Year:
2004
No.:
2004-6744
Paper no.:
AIAA Paper 2004-6744
Pub. info.:
[Reston, Va.]: American Institute of Aeronautics and Astronautics
ISSN:
10877215
Language:
English
Call no.:
A07400/200421 [CD-ROM 2004 Disc 21]
Type:
Technical Paper

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