SOI Technology for Single-Chip Harsh Environment Microsystems

SOI Technology for Single-Chip Harsh Environment Microsystems

Author(s):

Flandre, D. ( Universite catholique de Louvain (UCL) CERMIN, Louvain-la-Neuve, Belgium )

Publication title:

AIAA meeting papers on disc

Title of ser.:

AIAA Paper : Conference on Micro-Nano-Technologies

Ser. no.:

2004

Pub. Year:

2004

No.:

2004-6736

Paper no.:

AIAA Paper 2004-6736

Pub. info.:

[Reston, Va.]: American Institute of Aeronautics and Astronautics

ISSN:

10877215

Language:

English

Call no.:

A07400/200421 [CD-ROM 2004 Disc 21]

Type:

Technical Paper

Details

TDL ID:	ZA00001550
Series ID:	PA00000056
Conf. info. (Name):	CANEUS - Conference on Micro-Nano-Technologies
Conf. info. (Number):	2004
Conf. info. (Venue):	Monterey, California
Conf. info. (Date):	2004.11.01-2004.11.05

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