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An Integrated CMOS MEMS Xylophone Magnetometer with Capacitive Sense Electronics

Author(s):
Publication title:
A collection of technical papers : NANOTECH・2002, Houston, Texas, 9-12 September 2002
Title of ser.:
AIAA Paper
Pub. Year:
2002
No.:
AIAA-2002-5723
Paper no.:
AIAA-2002-5723
Page(from):
147
Page(to):
151
Pages:
5
Pub. info.:
American Institute of Aeronautics and Astronautics
ISBN:
9781563475511 [1563475510]
Language:
English
Call no.:
A07400/025700
Type:
Technical Paper

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