Blank Cover Image

Surface Micromachined Structures with Continuous Hinges and Microrivets for Assembling Three-Dimensional MEMS Devices

Author(s):
Kolesar, E.
Ruff, M.
Odom, W.
Wilks, R.
Allen, P.
Wilken, J.
Jayachandran, A.
McAllister, J.
Howard, J.
Ko, S.
Bosch, J.
Boydston, N.
7 more
Publication title:
A collection of technical papers : NANOTECH・2002, Houston, Texas, 9-12 September 2002
Title of ser.:
AIAA Paper
Pub. Year:
2002
No.:
AIAA-2002-5705
Paper no.:
AIAA-2002-5705
Page(from):
35
Page(to):
40
Pages:
6
Pub. info.:
American Institute of Aeronautics and Astronautics
ISBN:
9781563475511 [1563475510]
Language:
English
Call no.:
A07400/025700
Type:
Technical Paper

Similar Items:

1 Conference Proceedings Surface Micromachined Polysilicon Components Containing Continuous Hinges and Microrivets Used to Realize Three-Dimensional MEMS Structures

Kolesar, Edward S., Ruff, Matthew D., Odom, William E., Ko, Simon Y., Howard, Jeffery T., Allen, Peter B., Wilks, …

Materials Research Society
7 Conference Proceedings Asymmetrical Polysilicon Electrothermal Microactuators for Achieving Large In-Plane Mechanical Forces and Deflections

Kolesar, Edward S., Allen, Peter B., Boydston, Noah C., Howard, Jeffery T., Ko, Simon Y., Ruff, Matthew D., Wilken, Josh …

Materials Research Society
2 Conference Proceedings Use of Continuous Hinges and Microrivets to Facilitate the Assembly of Three-Dimensional Polysilicon Microelectromechanical Systems (MEMS) Structures

Kolesar, E.S., Ruff, M.D., Odom, W.E., Ko, S.Y., Howard, I.T., Allen, P.B., Wilks, R.J., Wilken, J.M., Bosch, J.E., …

Electrochemical Society
8 Conference Proceedings Theoretical and experimental characterization of the in-plane tip force and deflection achieved with asymmetrical polysilicon electrothermal microactuators

Allen,P.B., Boydston,N.C., Howard,J.T., Ko,S.Y., Kolesar,E.S., Ruff,M.D., Wilken,J.M., Wilks,R.J.

SPIE-The International Society for Optical Engineering
3 Technical Paper Surface Micromachined Structures with Continuous Hinges and Microrivets for Assembling Three-Dimensional MEMS Devices.

Kolesar, E.S., Ruff, M.D., Odom, W.E., Ko, S.Y., Howard, J.T.

Society of Manufacturing Engineers
9 Conference Proceedings Torsional micromirror array design for optical binary switching and amplitude modulation applications

Kolesar, E. S., Allen, P. B., Boydston, N. C., Howard, J. T., Ko, S. Y., Wilken, J. W.

MRS-Materials Research Society
4 Conference Proceedings Bi-Directional Motion Achieved With a Surface Micromachined Electrothermal MEMS Microengine

Kolesar, Edward, Jayachandran, Alfred, Odom, William, Ruff, Matthew, McAllister, Justin, Ko, Simon, Howard, Jeffrey, …

Materials Research Society
10 Conference Proceedings Optical binary switch and amplitude modulator micromirror arrays

Kolesar,E.S., Allen,P.B., Boydston,N.C., Howard,J.T., Ko,S.Y., Wilken,J.M.

SPIE - The International Society for Optical Engineering
5 Conference Proceedings Design and Performance of a Microengine Realized With Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators

Kolesar, Edward S., Ruff, Matthew D., Odom, William E., Jayachandran, Joseph A., McAllister, Justin B., Ko, Simon Y., …

Materials Research Society
11 Conference Proceedings Optical MEMS devices based on micromachined torsion structure

Y. Wu, J. Xu, S. Li, Z. Wan, C. Mu

Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Design and performance of a polysilicon surface-micromachined microengine realized with arrays of asymmetrical electrothermal microactuators

Kolesar,E.S., Ruff,M.D., Ko,S.Y., Wilks,R.J., Howard,J.T., Allen,P.B., Wilken,J.M., Bosch,J.E.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Surface-micromachined counter-meshing gears discrimination device

Polosky,M.A., Garcia,E.J., Allen,J.J.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12