Role of Boundary Conditions in Monte Carlo Simulation of MEMS Devices

Role of Boundary Conditions in Monte Carlo Simulation of MEMS Devices

Author(s):

Nance, Robert P. ( North Carolina State Univ. )
Hash, David B. ( National Academy of Sciences - National Research Council )
Hassan, H. A. ( North Carolina State Univ. )

Publication title:

NASA Technical Reports

Pub. Year:

1997

Vol.:

19970025018

Issue:

NASA-CR-205107

Pt.:

NAS 1.26:205107

Page(from):

1

Page(to):

14

Pages:

14

Pub. info.:

National Aeronautics and Space Adminstration

Language:

English

Type:

Technical Paper

Details

TDL ID:

ZA00001434

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