Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry

Characterization of SiGe/Ge heterostructures and graded layers using variable angle spectroscopic ellipsometry

Author(s):

Croke, E. T. ( Hughes Research Labs. )
Wang, K. L. ( California Univ. )
Heyd, A. R. ( NASA Lewis Research Center )
Alterovitz, S. A. ( NASA Lewis Research Center )
Lee, C. H. ( California Univ. )

Publication title:

NASA Technical Reports

Pub. Year:

1996

Vol.:

19960038261

Issue:

NASA-TM-111685

Pt.:

NAS 1.15:111685

Paper no.:

N96-30741

Page(from):

1

Page(to):

8

Pages:

8

Pub. info.:

National Aeronautics and Space Adminstration

Language:

English

Type:

Technical Paper

Details

TDL ID:

ZA00001432

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