Rapid Thermal Processing (RTP) of Semiconductors in Space

Rapid Thermal Processing (RTP) of Semiconductors in Space

Author(s):

Anderson(P.I.), T.J. ( Department of Chemical Engineering )
Jones(Co-P.I.), K.S. ( Department of Materials Science and Engineering University of Florida )

Publication title:

NASA Technical Reports

Pub. Year:

1993

Issue:

NASA-CR-193110

No.:

G3/29 0167269

Pt.:

NAS 1.26:193110

Paper no.:

N93-28408

Page(from):

1

Page(to):

30

Pages:

30

Pub. info.:

National Aeronautics and Space Adminstration

Language:

English

Type:

Technical Paper

Details

TDL ID:

ZA00001429

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