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PREPARATION DE COUCHES MINCES D'OXYNITURE DE SILICIUM PAR RECVD EN VUE DE GREFFAGE CHIMIQUE. APPLICATION A UN ISFET PH

Author(s):
CLECHET, P.
CROS, Y.
FOMBON, J.J.
JAFFREZIC, N.
MARTIN, J.C.
ROBERT, J.L.
VEDEL, J.
2 more
Publication title:
NASA Technical Reports
Pub. Year:
1991
No.:
N93-11574
Paper no.:
N93-11574
Page(from):
1
Page(to):
118
Pages:
118
Pub. info.:
National Aeronautics and Space Adminstration
Language:
French
Type:
Technical Paper

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