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ACTIVATION UNIFORMITY DEPENDENCE OF UNDOPED SEMI-INSULATING GaAs ON POST-IMPLANT ANNEALING CONDITIONS

Author(s):
Publication title:
NASA Technical Reports
Pub. Year:
1990
No.:
N90-23246
Paper no.:
N90-23246
Page(from):
1
Page(to):
6
Pages:
6
Pub. info.:
National Aeronautics and Space Adminstration
Language:
English
Type:
Technical Paper

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