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ADHESION, FRICTION, AND WEAR OF PLASMA-DEPO-SITED THIN SILICON NITRIDE FILMS AT TEMPERATURES TO 700 C

Author(s):
Miyoshi, K. et al. ( NASA )  
Publication title:
NASA Technical Reports(N89)
Pub. Year:
1988
Issue:
NASA-TM-101377
No.:
G/27 0174645
Pt.:
NAS1.15:101377
Paper no.:
N89-11913
Page(from):
1
Page(to):
12
Pages:
12
Pub. info.:
National Aeronautics and Space Administration
Language:
English
Type:
Technical Paper

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