Design and control of a mini-actuator for mechanical probing systems

Design and control of a mini-actuator for mechanical probing systems

Author(s):

Lo, Jiann-Chang ( IBM Corporation )
Servedio, M. S.

Publication title:

A.S.M.E. paper

Title of ser.:

ASME Technical Paper : WA/DE

Ser. no.:

1998

Pub. Year:

1998

No.:

98-WA/DE-4

Paper no.:

98-WA/DE-4

Pub. info.:

New York: The American Society of Mechanical Engineers

Language:

English

Call no.:

A11800

Type:

Technical Paper

Details

TDL ID:	ZA00002528
Series ID:	PA00000197
Conf. info. (Name):	ASME International Mechanical Engineering Congress & Exposition
Conf. info. (Number):	1998
Conf. info. (Venue):	Anaheim, California
Conf. info. (Date):	1998.11.15-1998.11.20
Note for article:	Presented at the ASME International Mechanical Engineering Congress & Exposition Anaheim, California - November 15-20, 1998

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